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Predictive Simulation of Semiconductor Processing Status and Challenges by Jarek Dabrowski

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Published by Springer Berlin Heidelberg in Berlin, Heidelberg .
Written in English

Subjects:

  • Surfaces (Physics),
  • Mathematical physics,
  • Structural control (Engineering),
  • Engineering,
  • Nanotechnology

Book details:

About the Edition

Predictive simulation of semiconductor processing enables researchers and developers to extend the scaling range of semiconductor devices beyond the parameter range of empirical research. It requires a thorough understanding of the basic mechanisms employed in device fabrication, such as diffusion, ion implantation, epitaxy, defect formation and annealing, and contamination. This book presents an in-depth discussion of our current understanding of key processes and identifies areas that require further work in order to achieve the goal of a comprehensive, predictive process simulation tool.

Edition Notes

Statementedited by Jarek Dabrowski, Eicke R. Weber
SeriesSpringer Series in MATERIALS SCIENCE -- 72, Springer Series in MATERIALS SCIENCE -- 72
ContributionsWeber, Eicke R.
Classifications
LC ClassificationsT174.7, TA418.9.N35
The Physical Object
Format[electronic resource] :
Pagination1 online resource (xvii, 490 p.)
Number of Pages490
ID Numbers
Open LibraryOL27082394M
ISBN 103642058043, 3662094320
ISBN 109783642058042, 9783662094327
OCLC/WorldCa851378807

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